Email:Louis@lithmachine.com
ItemNo :
Lith-CK600MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 daysEmail :
Louis@lithmachine.com
Model: CK600 -Multi-target, Multi-film Deposition
|
Category |
Parameter |
|
Primary Application |
Nanoscale monolayer/multilayer films (hard coatings, metals, semiconductors, dielectrics) |
|
Target Users |
Universities, research institutes (R&D and small-batch production) |
|
System Composition |
Vacuum chamber, sputtering targets, sample stage, vacuum pumps, gas delivery, control systems, film thickness monitor, and auxiliary components |
|
Parameter |
Specification |
|
Ultimate Vacuum |
6.7 × 10-5 Pa |
|
System Leak Rate |
≤1 × 10-7 Pa·L/s |
|
Vacuum Recovery Time |
≤40 min (to 6.6 × 10-1 Pa after N2 purge) |
|
Component |
Specification |
|
Chamber Dimensions |
Ø630 mm × 350 mm (cylindrical) |
|
Sample Capacity |
8 × 4-inch substrates (1 mm thickness) |
|
Feature |
Specification |
|
Target Types |
3 × Permanent magnet targets, 3 × High-intensity magnet targets |
|
Cooling Method |
Indirect water-cooled (brazed structure) |
|
Target Diameter |
Ø100 mm |
|
Target-Substrate Distance |
50–90 mm (manual adjustment, with position indicator) |
|
Sputtering Mode |
Vertical downward sputtering |
|
Parameter |
Specification |
|
Bias Voltage |
Up to -200 V |
|
Rotation Mechanism |
Computer-controlled revolution + rotation (stepper motor-driven) |
|
Temperature Control |
RT to 300°C (single calibration required; 3 heaters, one active at a time) |
|
Component |
Specification |
|
Mass Flow Controllers (MFC) |
2 channels |
|
Film Thickness Monitor |
Quartz crystal microbalance (0–999,999 Å) |
|
Configuration |
Components |
|
Standard |
Turbo molecular pump + dry scroll pump |
|
Alternative |
Cryogenic pump + dry scroll pump |
· Real-time displacement/speed monitoring with error calculation.
· Linear/logarithmic display modes for speed vs. displacement.
· Site-specific deposition via precision positioning.
✔ Multi-Target Flexibility – Supports diverse materials (metals, oxides, nitrides).
✔ Uniform Deposition – Computer-controlled rotation ensures film consistency.
✔ High Vacuum Stability – Minimizes contamination for high-purity films.
✔ Research-Ready – Modular design suits optoelectronics, tribological coatings, and semiconductor R&D.
Ideal for: Advanced material science studies and prototyping of functional thin-film devices.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
Louis@lithmachine.com
+0086 15959378975
