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SEM Low-Temperature Mini Magnetron Sputtering System

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  • Tel : +86 13174506016
  • Email : Louis@lithmachine.com
  • Whatsapp : +86 18659217588
  • Wechat : 18659217588
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SEM Low-Temperature Mini Magnetron Sputtering System SEM Low-Temperature Mini Magnetron Sputtering System SEM Low-Temperature Mini Magnetron Sputtering System

SEM Low-Temperature Mini Magnetron Sputtering System

  • Product Details

 SEM Low-Temperature Mini Conductive Magnetron Sputtering System


Glovebox-Compatible SEM Sample Coater for Beam-Sensitive Materials


1. System Overview

✔ Non-conductive sample coating (Au/Ag/Pt) for SEM imaging
✔ Temperature-sensitive substrates (<60°C process temp)
✔ High-quality thin film deposition with minimized thermal damage
2.  Core parameter

Parameter

Specification

Ultimate Vacuum

4×10⁻² mbar

Base Vacuum

1 Pa

Pump Down Time

<1 minute

Vacuum Pump

Rotary Vane (2 L/s, Oil-lubricated)

Vacuum Measurement

Mechanical Gauge (Atmosphere-10⁻² mbar)

3. Cold Sputtering Technology: Patented magnetic confinement reduces substrate heating

4. Glovebox-Adaptable: Optional configuration for inert atmosphere processing

Parameter

Specification

Model

Lith-BY-JS08

Sputtering Type

DC Magnetron (Physical Vapor Deposition)

Target Materials (Standard)

Au (50mmØ×0.1mm)

Optional Target Materials

Ag, Pt, Cr

Maximum Substrate Size

Ø70mm (customizable)

Chamber Material

Borosilicate Glass (160mmØ×120mmH)

System Dimensions (W×D×H)

300×360×380 mm

Weight

28 kg


SEM Sputter Coater

SEM Sputter Coater




PACKAGE:
     1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
     2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
     3 Responsible for the damage during the shipping process, will change the damage part for you for free.
 

DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity