Email:Louis@lithmachine.com
ItemNo :
Lith-SD-900MMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 daysEmail :
Louis@lithmachine.com
Glovebox-Compatible SEM Sample Coater for Beam-Sensitive Materials
1. System Overview
✔ Non-conductive sample coating (Au/Ag/Pt) for SEM imaging
Parameter
Specification
Ultimate Vacuum
4×10⁻² mbar
Base Vacuum
1 Pa
Pump Down Time
<1 minute
Vacuum Pump
Rotary Vane (2 L/s, Oil-lubricated)
Vacuum Measurement
Mechanical Gauge (Atmosphere-10⁻² mbar)
✔ Temperature-sensitive substrates (<60°C process temp)
✔ High-quality thin film deposition with minimized thermal damage
2. Core parameter
3. Cold Sputtering Technology: Patented magnetic confinement reduces substrate heating
4. Glovebox-Adaptable: Optional configuration for inert atmosphere processing
Parameter
Specification
Model
SD-900M
Sputtering Type
DC Magnetron (Physical Vapor Deposition)
Target Materials (Standard)
Au (50mmØ×0.1mm)
Optional Target Materials
Ag, Pt, Cr
Maximum Substrate Size
Ø70mm (customizable)
Chamber Material
Borosilicate Glass (160mmØ×120mmH)
System Dimensions (W×D×H)
300×360×380 mm
Weight
28 kg
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
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ONLINE
Louis@lithmachine.com
+0086 15959378975
