ItemNo :
Lith-SD-2200MMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 daysEmail :
Louis@lithmachine.com
Model: SD-2200M – Product Specifications
Parameter | Specification |
---|---|
Model Number | SD-2200M |
Vacuum Pump | Oil-required Rotary Vacuum Pump (Explicit oil filling needed) |
Pumping Speed | 50Hz: 16 m³/h (4.4 L/s) • 60Hz: 19.2 m³/h (5.2 L/s) • 20% speed boost at 60Hz |
Ultimate Vacuum | 2 Pa |
Max Sputtering Current | 1.6A |
Operating Pressure Range | 20 Pa – 8 Pa |
Pump-Down Time | <5 min (to 2 Pa) |
Vacuum Measurement Range | Atmospheric pressure to 2×10⁷ mbar |
Gas Control System | Precision Gas Flow Controller |
Chamber Specifications | Ø350 × 240mm (H) • Scratch-resistant quartz glass viewport |
Target Specifications | Ø200mm • Materials: Au, Ag, Pt, Cu (noble/conductive metals) |
Operation | Instruction manual guided |
Dimensions/Weight | 490(L) × 400(W) × 590(H) mm • 70 kg |
Power Requirements | Dual-voltage: AC 110V/60Hz (Americas) or AC 220V/50Hz (Europe/Asia) |
Power Consumption | <1500W |
Warranty & Support | 1-year limited warranty + lifetime technical support |
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity