ItemNo :
Lith-HZ-JS02MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Model: Lith-HZ-JS02-Low-Temperature SEM Preparation
Key Features & Applications
The Lith-HZ-JS02 Magnetron Sputtering System integrates advanced vacuum technology with intelligent automation, delivering high uniformity, efficiency, and versatility for precision thin-film deposition. Its large-target design and planar magnetron cathode minimize plasma-induced thermal damage, making it ideal for temperature-sensitive samples (e.g., polymers, fibers, biological specimens) and high-resolution SEM preparation.
|
Category |
Specifications |
|
Dimensions |
530 × 300 × 320 mm |
|
Input Voltage |
100–250 VAC, 50/60 Hz |
|
Sputtering Voltage |
300–600 V (DC) |
|
Target Material |
Ø50 × 0.1 mm (Au, Pt, Ag, Pd, etc.) |
|
Control Mode |
5-inch touchscreen (ARM architecture, bilingual UI) |
|
Power Consumption |
100 W |
|
Sputtering Current |
10–50 mA (1 mA precision) |
|
Sputtering Time |
0–600 s (1 s step) |
|
Working Vacuum |
2–10 Pa (0.1 Pa resolution) |
|
Ultimate Vacuum |
<1 Pa |
|
Vacuum Measurement |
Full-range Pirani gauge |
|
Chamber Size |
Ø160 × 120 mm |
|
Sample Stage |
Ø80–100 mm (holds 12 standard stubs) |
|
Protections |
Overcurrent, vacuum safety |
1. Sputtering Source: Planar magnetron cathode for Au/Pt/Pd/Ag deposition.
2. Power Supply: Constant-current DC (300–600 V, ±1 mA precision).
3. Vacuum System: Rotary vane pump (<1 Pa), Pirani monitoring.
4. Automation: One-touch operation with parameter memory.
5. Data Display: Real-time curves for current, voltage, and vacuum status.
· Nano-scale Coating: Particle size <5 nm, ideal for high-resolution SEM.
· Low Thermal Impact: Magnetron technology reduces sample heating.
· High Throughput: 12-sample capacity with auto-rotation for uniformity.
· Plug-and-Play: No specialized training required.
Ideal for: Material science, biology, and conductive/thermal enhancement of non-metallic samples.
· Target Replacement: Tool-free design with shielded ring mechanism.
· Maintenance: Oil-lubricated pump (included) with visual oil-level window.
· Gas Connection: Supports Ar/N₂ or ambient air (6 mm OD tubing).
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18659217588
18659217588
