High-Precision Multi-Target Magnetron Sputter Coating System Coater

ItemNo :
Lith-CK300-01
MOQ :
1
Compliance:
CE Certified
Warranty:
1 year
Delivery Time:
5 days
Email :
Louis@lithmachine.com

Contact Now

Product Details

High-Precision Multi-Target Magnetron Sputter Coating System Coater

Model: CK300-01| – Product Specifications

Specifications

Category	Parameter	Details
Vacuum Performance	Ultimate Vacuum (Sputtering Chamber)	≤6.6×10⁻⁶ Pa
	System Leak Rate	≤5.0×10⁻⁷ Pa·L/S
	Pump-Down Time (Atmosphere → 6.6×10⁻⁴ Pa)	≤30 min
	Vacuum Retention (After 12 Hours Shutdown)	≤5 Pa
Sputtering Chamber	Structure	Vertical, top-opening, stainless steel (argon-welded, electropolished)
	Dimensions	≥Ø300 mm × 300 mm (with anti-contamination liner)
	Bakeability & Sealing	100–150°C; metal gasket/fluororubber O-ring
Magnetron Sputtering	Target Configuration	3 × 50 mm adjustable-angle permanent magnet targets (RF/DC/MF compatible)
	Power Supply	2 × DC (≥500 W), 1 × auto-matching RF (≥500 W)
	Film Uniformity	≤5% deviation
	Additional Features	3 × SMC rotary shutters; magnetic material support
Substrate Stage	Sample Capacity	1 × ≥100 mm diameter
	Rotation Speed	0–30 RPM (adjustable)
	Heating Range	RT–500°C (PID-controlled, thermocouple feedback)
Gas Delivery	Mass Flow Control	2 paths (100 SCCM + 20 SCCM MFCs, CF16 valves)
	Auxiliary Gas Lines	2 × DN16 inlet valves
Pumping System	High-Vacuum Pump	Pfeiffer Hipace 700 (680 L/s) + 4 L/s rotary pump
	Valves & Pipeline	DN40/CC150 pneumatic valves, stainless steel bellows
Control & Safety	Automation	PLC + industrial PC + touchscreen (real-time monitoring/logging)
	Protection	Interlocks for water/power faults (overcurrent, open circuit, etc.)
Additional Components	Frame	Steel construction, lockable casters, removable panels
	Included Accessories	Chiller, silent compressor, tool kit, spare parts
Measurement	Vacuum Gauge	INFICON combination gauge

Key Advantages & Applications

Advantages:

High Precision: Ultra-high vacuum (UHV) capability ensures contamination-free thin-film deposition.

Flexibility: Multi-target configuration with adjustable parameters for diverse materials (including magnetic films).

Reliability: Robust PLC automation with fail-safe interlocks and real-time diagnostics.

User-Friendly: Integrated touchscreen and PC control streamline operation.

Target Applications:

Research & Development: Ideal for academic or industrial labs studying advanced coatings (e.g., semiconductors, optics).

Industrial Coating: Suitable for small-scale production of functional films (wear-resistant, conductive, or decorative layers).

Material Science: Supports experiments requiring controlled environments (e.g., reactive sputtering, multi-layer deposition).

High-Precision Sputtering Coater

Multi-Target Coater

PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.

DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity

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