ItemNo :
Lith-QH-DZ01MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Vacuum Multilayer Metal/Organic Thin Film Evaporation Deposition System
|
No. |
Parameter |
Specification |
|
1 |
Ultimate Vacuum |
≤6×10−5 Pa (after baking, new equipment) |
|
2 |
Leak Rate |
≤6.7×10−8 Pa·L/S |
|
3 |
Working Vacuum |
7×10−4 Pa (reached in <40 min) |
|
4 |
System Pressure Holding |
≤10 Pa after 12 hours (post shutdown) |
|
5 |
Sample Size |
100×100 mm |
|
6 |
Sample Holder Size |
126×126 mm (includes 2 sets) |
|
7 |
Evaporation Distance |
330±20 mm |
|
8 |
Sample Stage |
0–30 RPM rotation; Heating: 300°C (±1°C) |
|
9 |
Electron Gun |
6 kW, 270° deflection, 4-pocket water-cooled crucible |
|
10 |
Resistive Evaporation |
Dual-position switching |
|
11 |
Thickness Probes |
2 sets (quartz crystal) |
|
12 |
Chamber Access |
Manual front-opening design |
|
13 |
Control Mode |
Power-regulated deposition |
|
14 |
Film Uniformity |
≤±3% (9-point test on 10×10 cm2) |
|
15 |
Pumping System |
Automated vacuum control |
·Ultra-High Vacuum Performance
o Achieves ≤6×10−5 Pa after baking, ideal for contamination-sensitive applications.
o Low leak rate (6.7×10−8 Pa·L/S) ensures long-term stability.
o ±1°C heating accuracy (sample stage) minimizes thermal stress on films.
o ±3% thickness uniformity across 9 test points for reproducible coatings.
·Efficiency & Automation
o <40 min pump-down time (ambient to working vacuum) reduces idle periods.
o Automated pumping/control lowers operator dependency and human error
·Versatile Evaporation Options
o 6 kW e-gun handles refractory materials (e.g., oxides, carbides).
o Dual-position resistive evaporation for sequential metal/alloy deposition.
·User-Friendly Design
o Front-opening chamber simplifies sample loading/cleaning.
o 2 thickness probes enable real-time monitoring and correction.
· Optics & Photonics
o Anti-reflection coatings, laser mirrors, optical filters.
· Semiconductor & Electronics
o Thin-film transistors, conductive layers, MEMS devices.
· R&D & Academia
o Material science studies, nanostructured films, solar cell research.
· Industrial Coatings
o Wear-resistant layers, decorative films, barrier coatings.
· Larger sample holders (up to 200×200 mm).
· Additional probes or substrate heating configurations.
· Integration with in-situ monitoring tools (e.g., ellipsometry)
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
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