ItemNo :
Lith-PC-DZ04MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Vacuum Benchtop PVD Systems Manufacturer For Metal, Oxide, Semiconductor Deposition
· Deposition of conductive, semiconductor, ferroelectric, and optical films
· Ideal for research labs, universities, and small-scale production
✔ High-precision deposition with E-type electron gun for uniform coatings
✔ Dual evaporation modes (E-beam + optional resistive thermal evaporation)
✔ Rotating & heated substrate stage (up to 800°C) for improved film adhesion
✔ Fast vacuum recovery (<20 min to high vacuum) for efficient operation
✔ Quartz crystal monitoring for real-time thickness control (0–999.99 nm)
✔ Flexible configuration (4-pocket crucible, multi-material compatibility)
|
Category |
Parameter |
Value/Description |
|
Vacuum System |
Ultimate Vacuum |
≤6.7×10-4Pa |
|
|
Vacuum Recovery Time (1×10-1→5×10-4) |
≤20 min |
|
|
Leak Rate |
≤6.7×10-7 Pa·L/s |
|
Vacuum Chamber |
Dimensions |
500 × 500 × 600 mm (U-shaped, front-opening) |
|
E-Gun Evaporation |
Anode Voltage |
6 kV / 8 kV (1 set) |
|
|
Crucible |
Water-cooled, 4-pocket (11 mL each) |
|
|
Power Range |
0–6 kW (adjustable) |
|
Resistive Evaporation (Optional) |
Voltage |
5 V / 10 V |
|
|
Max Current/Power |
300 A / 3 kW (1 set) |
|
|
Electrodes |
3 water-cooled (configurable for 2 boats) |
|
Substrate Handling |
Max Substrate Size |
4″ (100 mm) |
|
|
Rotation Speed |
5–60 RPM |
|
|
Source-to-Substrate Distance |
300–350 mm |
|
|
Heating Temperature |
Up to 800°C (±1°C) |
|
Control & Monitoring |
Shutter |
Manual (1 set) |
|
|
Gas Flow Control |
1-channel MFC |
|
|
Thickness Monitor (QCM) |
0–99,999 Å (0–999.99 nm) |
· Semiconductor research (dielectric layers, conductive films)
· Optical coatings (anti-reflective, filters, mirrors)
· Advanced materials (ferroelectrics, superconductors, 2D materials)
· Prototype development for thin-film devices
· Reliable performance for high-purity film growth.
· Modular design supports diverse materials and processes.
· User-friendly controls for both manual and precision deposition.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18659217588
18659217588
