ItemNo :
Lith-TK-DZ01MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Electron Beam Metal Thermal Evaporator Coating System For Nano Film Fabrication Manufacturer
Lith-TK-DZ01-Precision Thin-Film Deposition Solution for Research & Industry
Technical Specifications
|
Parameter |
Specification |
|
Chamber Dimensions |
Φ600mm × 750mm (Water-cooled stainless steel) |
|
Base Pressure |
≤5.0×10⁻⁵ Pa (after 24h baking) |
|
Pumping Speed |
≤40 min (air → 5×10⁻⁴ Pa) |
|
Leak Rate |
≤0.8 Pa/h |
|
Substrate Capacity |
Flat (Φ350mm) or Spherical (optional) |
|
Heating Temperature |
Up to 300°C (±1°C) |
|
Rotation Speed |
0-20 rpm (with bias voltage) |
|
E-Gun Power |
10kW (6-pocket crucible) |
|
Resistance Sources |
2 sets (3000W total) |
|
Film Uniformity |
≤±5% |
Key System Advantages
1. Superior Thin Film Quality
·Ultra-high vacuum environment (<5×10⁻⁵ Pa) minimizes contamination
·Optional ion-assisted deposition enhances film density and adhesion
·Excellent thickness uniformity (±5%) for precision applications
2. Enhanced Process Capabilities
·Dual evaporation sources (E-beam + thermal) for material flexibility
·Heated rotating substrate stage (300°C) for uniform deposition
·Modular design allows future upgrades (optical monitoring, automation)
3. User-Friendly Operation
·Intuitive PLC+touchscreen control interface
·Comprehensive safety interlocks (cooling, vacuum, power)
·Compact footprint (2.5m×1.6m) optimized for lab spaces
Primary Application Areas
Optical Coatings
• Anti-reflection coatings
• Laser mirrors and filters
• IR optical components
Electronic & Semiconductor Films
• Transparent conductors (ITO, AZO)
• Dielectric layers (SiO₂, Al₂O₃)
• Semiconductor device fabrication
Functional Material Research
• Ferroelectric films (PZT, BST)
• Magnetic thin films
• 2D material encapsulation
Ideal For:
✓ Academic research laboratories
✓ Industrial R&D centers
✓ Small-scale precision coating production
✓ Advanced material development projects
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
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Louis@lithmachine.com
+86 18659217588
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