ItemNo :
Lith-ZY-ZD02MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Benchtop Multi-Layer Thermal Evaporator Deposition Coating For Metals, Alloys & Dielectric Film
1. Portability & Flexibility
·Compact footprint with multi-environment adaptability (lab/office).
2. User-Centric Design
·One-touch operation with preloaded parameters (100+ metal deposition recipes).
·10" touchscreen for intuitive process control and real-time monitoring.
3. High-Performance Deposition
·4-source simultaneous evaporation (supports 99 layers of metals/alloys/polymers per run).
·Quartz crystal monitoring for nanometer-level thickness accuracy (±3% uniformity).
4.Premium Components
·All-aluminum chamber for efficient heat dissipation.
·Imported turbo-molecular pump (300L/s) ensures ≤6×10−5 Pa ultimate vacuum.
5.Low Maintenance
·Minimal training required; modular design simplifies servicing.
· Thin-film material research (metals/dielectrics)
· Optical coatings & nanoelectronics
· Thin-film sensors & MEMS devices
· Custom alloy/polymer multilayer structures
|
Component |
Details |
|
Chamber |
400×350×360mm (H), CNC-machined aluminum |
|
Vacuum System |
300L/s turbo pump + dual-stage rotary vane pump |
|
Vacuum Measurement |
Full-range gauge (atmosphere to UHV) |
|
Evaporation Sources |
4 independent thermal sources (cross-contamination-free) |
|
Power Supply |
DC power for multi-layer deposition |
|
Thickness Control |
Quartz crystal monitor + manual/auto mode switching |
|
Software |
Network-upgradable with remote parameter adjustment |
Optional:
· Co-evaporation kit for alloys
· 2" substrate heater (400°C max)
· Water-cooled rotating sample stage
· Ultimate Vacuum: ≤6×10−5 Pa (after bake-out)
· Leak Rate: ≤5.0×10−9 Pa·L/s
· Deposition Rate: ≥8 nm/min (varies by material)
· Thickness Uniformity: ≤3% (with planetary rotation)
|
Parameter |
Specification |
|
Dimensions |
600×720×1200mm (H) |
|
Weight |
85 kg |
|
Environment |
23±3°C, <60% RH |
|
Power |
AC 230V, 32A, 50Hz |
|
Cooling Water |
0.2MPa, 15–25°C, ≥8L/min (optional) |
|
Gas Supply |
99.9% N2 (optional for venting) |
· Fully automated process: Pre-programmed vacuum pumping, substrate heating, and evaporation.
· Multi-layer capability: Sequential deposition of 4 materials (up to 99 layers) with customizable thickness/time modes.
· Data export: Real-time parameter logging and remote monitoring.
· Time-saving: Eliminates complex setup with industry-leading uptime.
· Precision: Combines lab-grade vacuum performance with production-level repeatability.
· Scalability: Modular options cater to evolving research needs.
Ideal for academic labs, startups, and industrial R&D requiring rapid prototyping of advanced thin films.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18659217588
18659217588
