ItemNo :
Lith-SRT-300MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Benchtop Multi-Layer Thermal Evaporator Deposition Coating For Metals, Alloys & Dielectric Film
SRT-300-Multi-Layer Deposition for Metals, Alloys & Dielectric Thin Films
Product Overview
The SRT-300 is a desktop thermal evaporation system designed for high-precision thin-film deposition in research and small-scale production. Featuring a turbomolecular pump vacuum system and multi-source evaporation capabilities, it enables efficient deposition of metals, alloys, and dielectric films with minimal operator training.
1. Wide Application Range
· Materials Research: Metal films, dielectric layers, polymer coatings.
· Functional Devices: Thin-film sensors, optical coatings, nanoelectronics.
· Multi-Layer Deposition: Supports up to 99 layers in a single run.
2. User-Friendly Operation
· Plug-and-play design—no specialized lab environment required.
· 10-inch touchscreen for intuitive control and process monitoring.
· Preloaded 100+ deposition recipes for quick setup.
3. High Precision & Stability
· Quartz crystal monitoring ensures real-time thickness control (≤3% uniformity).
· Turbo-molecular pump (300L/s) achieves ≤6×10⁻⁵ Pa ultimate vacuum.
· 3 independent evaporation sources prevent material cross-contamination.
4. Flexible Configuration
· Optional: Co-evaporation for alloys, 400°C substrate heating, and cooled rotating stage.
· Automatic & manual modes for customized process control.
5. Low Maintenance & Compact Design
· Aluminum chamber for efficient heat dissipation.
· 65 kg weight, suitable for benchtop use in labs or offices.
|
Parameter |
Specification |
|
Chamber |
Ø300 × 350(h) mm (quartz glass) |
|
Vacuum System |
300L/s turbomolecular pump + dual-stage rotary pump |
|
Ultimate Vacuum |
≤6 × 10⁻⁵ Pa (after baking) |
|
Leak Rate |
≤5.0 × 10⁻⁹ Pa·L/s |
|
Deposition Rate |
≥10 nm/min (material-dependent) |
|
Film Uniformity |
≤3% (with rotation) |
|
Evaporation Sources |
3 independent thermal sources |
|
Max Layers per Run |
99 layers (up to 4 materials) |
|
Control Interface |
10" touchscreen with programmable recipes |
|
Power Supply |
AC 230V, 32A, 50Hz |
|
Cooling Water (Optional) |
0.2 MPa, 15–25°C, ≥8 L/min |
1. Automated Deposition: Pre-programmed vacuum pumping, heating, and evaporation.
2. Multi-Layer Control: Supports time-based or thickness-based deposition modes.
3. Remote Monitoring: Adjust parameters via network connection.
✔ Combines research-grade performance with desktop convenience.
✔ Minimal training required—ideal for multi-user environments.
✔ Scalable for both experimental and small production needs.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18659217588
18659217588
