ItemNo :
Lith-ZHD400MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
ZHD400-High-Vacuum Multi-Material Evaporation
|
Category |
Parameter |
Specification |
|
Basic Configuration |
Model |
ZHD400 |
|
|
Coating Method |
Multi-source evaporation deposition |
|
|
Chamber Structure |
Vertical square, front-opening design |
|
Vacuum System |
Chamber Dimensions |
Ø400mm × H500mm (Material: 304 stainless steel) |
|
|
Ultimate Vacuum |
≤6.0×10⁻⁴ Pa |
|
|
Pump-down Time |
≤45 min (Atmosphere→10⁻⁴ Pa) |
|
|
Pump Configuration |
Compound molecular pump (FF-200/1200, 1200L/s) + Rotary vane pump (TRP-36, 9L/s) |
|
|
Vacuum Valves |
GDQ-200 main valve + GDQ-40 bypass valve |
|
Deposition Control |
Heating Temperature |
Room temperature ~ 300°C |
|
|
Substrate Holder |
120mm×120mm (Custom sizes available) |
|
|
Film Uniformity |
≤±5.0% |
|
|
Evaporation Sources |
3 groups (Boat-type + Filament-type for metals) with baffles |
|
|
Thickness Control |
Quartz crystal monitor (Optional, 1 water-cooled probe) |
|
Operational |
Control System |
PLC + Touchscreen |
|
|
Safety Protection |
Water shortage/Overcurrent/Voltage fault alarms |
|
|
Power Requirement |
≥8kW |
|
|
Dimensions |
1710mm(L)×850mm(W)×1850mm(H) |
Standard configuration: Manual button control. Quartz crystal monitor available as optional accessory.
◉ Modular Design
· Integrated vacuum chamber with automated welding and surface treatment
· Hybrid sealing (metal + fluororubber) for optimal vacuum maintenance
◉ Process Flexibility
· Simultaneous evaporation of metals (Al, Ag, Au, etc.) and organic materials
· Adjustable baffles for deposition uniformity control
◉ User-Oriented
· Explicit "Optional" labeling for thickness monitoring system
· Customizable substrate holders for specialized research needs
◉ Target Applications
Novel thin-film material development
Optoelectronic device research (OLED, thin-film solar cells)
Small-batch functional coating production
Advantages
|
Parameter |
ZHD400 |
Entry-Lab Systems |
Industrial Systems |
|
Evaporation Sources |
3 independent (metal/organic hybrid) |
1-2 single-type sources |
4-6 (customized) |
|
Thickness Control |
±5.0% (upgradable to ±2.0%) |
±8-10% (no real-time monitoring) |
±1-3% (multi-probe standard) |
|
Heating Rate |
10°C/min (RT→300°C) |
≤5°C/min |
15-20°C/min (high-temp) |
|
Leak Rate |
≤5×10⁻⁹ Pa·m³/s (metal seals) |
≤1×10⁻⁷ Pa·m³/s (rubber seals) |
≤1×10⁻¹⁰ Pa·m³/s |
|
Maintenance Cycle |
500hrs (turbo pump) |
300hrs |
1000hrs (mag-lev pumps) |
|
Coating Area |
144cm² (expandable to 400cm²) |
50-100cm² |
1000cm²+ |
Ideal for:
✓ Bridging lab-scale R&D and production verification
✓ Cross-disciplinary material research teams
✓ Budget-conscious innovators demanding industrial-grade performance
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Subscribe to us
ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18659217588
18659217588
