ItemNo :
Lith-PD-400MOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Deposition Equipment For Au, Ag, Al, Metal And Perovskite Films In Solar, OLED & Semiconductor Applications
PD-400-Multi-Material Coater for Au, Ag, Al, Perovskite Films
Product Overview
The PD-400 High-Vacuum Evaporation Coating System is designed for depositing high-quality metal, organic, and functional thin films, with broad applications in academic research (materials science, physics, chemistry, electronics, energy) and industrial R&D (OPV perovskite solar cells, semiconductors, OLED displays). It supports 4–6 evaporation sources (compatible with wire and boat configurations) and features a versatile design for both metal and organic material deposition (organic evaporation uses tungsten baskets/crucibles).
1. Precision & Stability
·Advanced evaporation power supply with constant current/power control, ensuring high process repeatability (±3%–5% uniformity).
·Programmable automation: One-touch start/stop and pre-set current/power parameters.
2. User-Friendly Operation
·PLC + touchscreen interface for intuitive control and high automation.
·Front-loading chamber (304 stainless steel, Ø260×H310 mm) with observation window for easy sample handling and maintenance.
3. Flexible Substrate & Source Options
·Adjustable substrate stage: Heated (0–300°C, ±1°C) or water-cooled, with rotational capability (0–30 RPM) and vertical adjustment (280–380 mm source-to-substrate distance).
·Multi-source compatibility: 4–6 sources for co-evaporation or sequential deposition, with anti-cross-contamination partitions.
4. High-Vacuum Performance
·Vacuum level: ≤5×10−5 Pa (base pressure);
·leak rate ≤5×10−8 Pa·m3s.
·Fast pumping: Achieves 5×10−4 Pa in <30 min (1200 L/s molecular pump + rotary vane pump).
5. Versatile Applications
·Deposits metals (Au, Ag, Al, Cu, etc.), compounds (MoO3, LiF), and organic materials.
6. Ideal for multilayer films, electrodes, and SEM sample preparation.
Parameter |
Detail |
Chamber Dimensions |
350×350×450 mm (L×W×H) |
System Footprint |
750×1100×1900 mm |
Max. Substrate Size |
120×120 mm |
Evaporation Sources |
4–6 groups (metal/organic) |
Film Uniformity |
±3%–±5% |
Pumping System |
Molecular pump + 6 L/s rotary pump |
Optional Accessories |
INFICON SQC310 thickness monitor, precision etching mask |
· Compact & Safe: Closed-frame design (0.7 m<sup>2</sup> footprint) with wheels for mobility.
· High Throughput: Processes up to 25 ITO/FTO glass slides (15–25 mm) per batch.
· Research-Grade: Supports OPV, OLED, and semiconductor R&D with industry-leading repeatability.
Ideal for: Universities, labs, and industries focused on advanced thin-film technologies.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity