ItemNo :
Lith-KJ12UHMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Ultrasonic Spin-Spray Coater for 12" Wafers With Heating Function
TMAX-KJ12UH is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on large substrates up to 12". The system consists of (1) a 12" spin coater with vacuum chuck, (2) a compressed air-assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating. It can also function as an atmospheric mist CVD system.
· Combines the benefits of spin and spray coating, enabling dense and uniform liquid-phase deposition on large substrates.
· Applications include:
1. Low-temperature precipitation (e.g., RF/microwave ferrites deposition)
2. Polymer coating
3. Powder and composite material coating
4. Coating on patterned/uneven substrates
· Operates in spin-only, spray-only, or combined modes.
· Vacuum chuck with adjustable substrate holders for flat substrates up to 12" diameter or 8" square.
· Includes one oil-less pump for the vacuum chuck, controlled by the spin coater.
· Spin speed: 300–3000 rpm (adjustable).
o Safety note: For substrates larger than 8", speed should be limited to 2000 rpm.
· Includes one ultrasonic generator with two ultrasonic spray nozzles (compressed air shaper included).
· Two spray nozzles with KF-25 adapter:
o Cylindrical type: Narrower spray (~20 mm diameter).
o Cone type: Wider spray (~40 mm diameter).
· Recommended compressed air pressure for aqueous solutions: ~2 psi.
· Integrated flow meter for regulating/monitoring compressed airflow.
· Fluid viscosity range: 1–100 mPa·s (cP).
· Swing arm for mounting the ultrasonic spray head (adjustable speed and movement range).
· Optional: Low-cost compressive gas atomizing nozzle (available upon request).
· Includes an LCD touch screen-controlled heatable syringe pump for liquid delivery to the ultrasonic nozzle.
· Comes with one 20 mL syringe (compatible with syringes of 0.4–30 mm diameter).
· Pumping rate: 0.001–20 mm/min (adjustable).
· Built-in flexible Polyimide heater with 30-segment programmable temperature controller (up to 75°C).
· Optional: Dual heat lamps (max. 1000 W, up to 80°C) with thermocouple and temperature controller for radiative substrate heating (up to 65°C on 12" metal substrates).
· Fume hood recommended for health/safety compliance.
· Compressive gas atomizing spray nozzle available for NRTL certification (see Pic. 2).
· Customized multi-spray head (available upon request; see Pic. 3).
· Power: 208–240 VAC, 50/60 Hz, 3000 W total.
· Gas: ~2 psi compressed air for the ultrasonic nozzle (air compressors available for order).
o Critical note: If using a gas cylinder instead of an air compressor (Pic. 2), a two-stage pressure regulator (Pic. 1) must be installed to limit pressure for safe operation.
· Net weight: 160 lbs.
· Shipping weight/dimensions:
1. 425 lbs, 48"×40"×42"
2. 255 lbs, 48"×40"×40"
3. 155 lbs, 48"×40"×35"
· CE Certified.
· 1-year limited warranty with lifetime support.
· Mandatory: Process must be conducted in a fume hood (see Optional section) with proper exhaust handling.
· Do not overfill the water bowl/base with liquid—excess liquid may leak into the motor shaft. Use a fabric cloth to wipe residues.
· For optimal coating quality, pre-clean substrates with a plasma cleaner (reduces surface tension; see pictures for details).
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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