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Heating Precision Vacuum Spin Coater (10K rpm & 5") with Vacuum Chucks or UV Cover

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Heating Precision Vacuum Spin Coater (10K rpm & 5

Heating Precision Vacuum Spin Coater (10K rpm & 5") with Vacuum Chucks or UV Cover

  • ItemNo :

  • MOQ :

  • Compliance:

    CE Certified
  • Warranty:

    1 year
  • Delivery Time:

    5 days
  • Email :
  • Product Details

Heating Precision Vacuum Spin Coater (10K rpm & 5") with Vacuum Chucks or UV Cover



· Aluminum casting case to keep spinning stable

· Drainage outlet and vacuum pump connector are on back panel

· One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump

· One oilless pump is included in the standard package. 

Chamber & Vacuum Chuck

· Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square

· Spinning chamber is made of PP which is corrosive resistant 

· One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers

· 1 piece of Adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates or wafer with size < 6

Spin Speed

· Digital control panel with two programmable segments of different spin times and speeds

· 500 - 6000 RPM adjustable spinning speed for each segment

Liquid Injecting

· 20mL syringe is used to contain the coating material

· The syringe holder height can be adjusted and rotated freely along the support rod


· You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating

· Using plasma cleaner to treat substrate surface before coating can improve film quality

· You may consider our new product: Heatable syringe 

· Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available

· Heating cover with digital temperature controller up to 100°C (max. duration < 1 minute) is available at extra cost  ($2495) , which allows sample drying in-situ during and after coating.

Input Power

· AC 110V/220V selectable

· There is a built in power socket on the right side of the  VTC-200 spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built in power socket will supply AC 110V)

Motor Power

90VDC , 150W

Product Dimensions

500mm(L) x 400mm(D) x 400mm(H)

Net Weight

20 kg (44 lbs)


· CE Certified


· One year limited with lifetime support

· Rusting and damage due to improper storage condition or maintenance are not covered by warranty


  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.


DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.