Programmable Hi-Speed Spin Coater (10K rpm & 5" ) with Vacuum Chucks (Optional Heating Cover)
Specifications
Main Features
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500 ~ 10000 RPM spinning speed programmable
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Accept substrate from 5 mm to 5"
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PP chamber for anti-corrosive operation.
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One gas inlet port on top of cover which can fill inert gas during coating
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One 20ml Plastic Syringe is included
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Safety interlock is integrated into the lid
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Vacuum Chuck
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Chamber size: 150 mm diameter
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Click the picture below right to watch demo video for how to use 9mm vacuum chuck hold 5mm sample.
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Vacuum Pump
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One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details.
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For Ar glove box user, Please consider our 24VDC vacuum pump to be used inside a glovebox without feedthrough.
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Vaccum grade rubber pipe is included for immediate use
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Programmable Contro
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Duration up to 60 seconds
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Acceleration: 100 - 2000 rpm / sec adjustable
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Accuracy: < 5%
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Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click picture below-right to see typical program setting)
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Input Power
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AC 220V (Please email us for AC 110V Version)
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1000 W total for oilless pump and spin cater
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24VDC high speed motor
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Gas Inlet
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6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment
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Liquid Injection
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Standard Package: 20ml plastic syringe with needle
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Option 1: Precision Electronic Single Channel Pipette: 20 - 200uL
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Option 2: Heatable glass syringe with temp. controller, up to 200C
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Optional
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Option 1: PE Heating cover with digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after coating process is completed.
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Option 2: PTFE Heating cover + PTFE vacuum chuck set is capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature.
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Option 3: Heatable syringe with digital temperature controller up to 200C is available upon request at extra cost. It provides the pre-heat solution during the coating process.
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Option 4: Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available
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Product Dimensions
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450mm Depth ×280mm W ×340mm H
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Net Weight
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20 kg
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PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.