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Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads

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  • Contact Person : Louis Yang
  • Tel : +86 13174506016
  • Email : Louis@lithmachine.com
  • Whatsapp : +86 18559646958
  • Wechat : 18659217588
  • Address : No. 5 Nanshan Road, Huli District, Xiamen City, Fujian Province, China
Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads

Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads

  • Product Details

Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads


TMAX-KJ124L is the Spin-Spray Coater with four nozzles for multi-layer coating processes on large substrates up to 12". Three types of spraying heads are selectable: the compressive gas-driven nozzle, 40KHz ultrasonic spraying head, and 120KHz ultrasonic spraying head, based on customer budget and applications.


SPECIFICATIONS

Category

Details

Features

• Combines spin and spray coating for dense, uniform liquid-phase deposition on large substrates (up to 12").

Four spray heads enable multi-layer coating via programmable touchscreen control.

Applications: Low-temperature precipitation (e.g., RF/ microwave ferrites), polymer coating, powder/composite coating, and coating on patterned/uneven substrates.

Spin Coater

• Vacuum chuck: Adjustable holders for substrates up to 12" diameter or 8" square.

• Includes oil-less vacuum pump (controlled by the spin coater).

• Spin speed: 300–3000 rpm (adjustable).

• Safety note: Limit to 2000 rpm for wafers >8".

Spray Nozzles

• Three selectable types:

Standard: Four compressive gas-driven nozzles - Optional: Four 40KHz ultrasonic nozzles + generator - Optional: Four 120KHz ultrasonic nozzles + generator • Note: Higher frequency = finer atomization/thinner coating but higher cost.

Peristaltic Pumps

Four pumps for delivering up to four solutions as programmed.

• Flow rate: 0.05–380 mL/min (programmable).

Sequential injection during spinning (adjustable flow rate/duration).

• Solenoid valves prevent cross-contamination.

Heating Cover (Optional)

• Ring-type halogen lamp heating element.

• Includes digital controller (±1°C accuracy).

Max. temperature: 100°C.

Control Panel

• Touchscreen programs:

- Spin speed (100–3000 rpm, fixed steps).

- Solution injection sequence (Pumps 1–4).

- Injection time per pump.

- Cycle count.

Utility Requirement

• Power: 208–240 VAC, 50/60 Hz, 3000 W total.

Net Weight

• 160 lbs.

Shipping Details

• Package 1: 423 lbs, 48×40×42".

• Package 2: 155 lbs, 48×40×35".

Compliance

• CE Certified.

Warranty

• 1-year limited warranty + lifetime support.


Application Notes
• Users must understand process risks and use proper protection. Confine processes to a fume hood with adequate exhaust.
• Coating quality depends on solution viscosity, spin speed, substrate heating, and ultrasonic spray parameters. Users should experiment for optimal results.
• Avoid overflushing the water bowl/base. Excess liquid may leak into the motor shaft—clean residues with a fabric cloth. Refer to spin coater cleaning instructions.
• For best results, pre-clean substrates with a plasma cleaner to reduce surface tension.




spin coater






PACKAGE:

  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.

 

DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.