ItemNo :
Lith-KJ123LMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Multi-layer Spin Spray Coater Manufacturer With 3 Nozzles For 12" Wafer 3K RPM
TMAX-KJ123L is a Mist Spin-Spray Coater with compressive gas-driven spray heads for a multi-layer coating process on a large substrate up to 12 inches. These three nozzles are adjustable up to 0.2 MPa gas pressure.
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Category |
Details |
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Features |
• Combines spinning and mist spraying for dense and uniform liquid-phase coating on large substrates. • Three spray heads enable programmable multi-layer coating via the touch screen control panel. |
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Spin Coater |
• Vacuum chuck with adjustable holders for substrates up to 12" diameter or 8" square. • Includes one oilless pump (controlled by the spin coater). • Spin speed: 10 – 3000 rpm (adjustable). • Safety note: For wafers >8", limit speed to 2000 rpm. |
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Spray Nozzles |
• Three 40 mm compressive gas-driven spray heads (standard). |
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Peristaltic Pumps |
• Three pumps for programmable multi-solution injection (one at a time). • Solenoid valves prevent cross-contamination. • Flow control: 0.1 – 100 rpm (~0.14 – 140 ml/min). |
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Heating Cover (Optional) |
• Halogen lamp ring heater (extra cost). • Digital controller (±1°C accuracy). • Max. temperature: 100°C. |
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Control Panel |
• Touchscreen for programming: Solution sequence (1–3 pumps), Injection time per pump, Cycle count. • Manual spin speed adjustment (10–3000 rpm, non-programmable). |
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Utility Requirement |
AC 110V/220V, 50/60 Hz. |
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Net Weight |
135 lbs (61.2 kg). |
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Dimensions |
• Coater: 600 × 740 × 500 mm (L×W×H). • Controller: 510 × 460 × 200 mm (L×W×H). |
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Shipping Weight & Dimensions |
310 lbs (140.6 kg), 47" × 38" × 51" (119 × 97 × 130 cm). |
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Compliance |
CE Certified. |
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Warranty |
1-year limited warranty + lifetime support |
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Consumables |
40 mm spray heads, rubber plugs, PTFE tubing (6.4/6 mm OD), O-rings. |
· User responsibility: Understand the risks and use proper protection. The process must be conducted in a fume hood with appropriate exhaust handling.
· Film coating quality depends on:
o Solution viscosity.
o Substrate spin speed.
o Heating.
o Ultrasonic spray parameters.
o Users should experiment for optimal results.
· Do not overfill the water bowl/base with liquid—excess liquid may leak into the motor shaft, causing damage. Use a fabric cloth to wipe residues. Refer to cleaning instructions for details.
· For best coating quality, clean the substrate with a plasma cleaner before coating to reduce surface tension.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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