ItemNo :
Lith-KJ12UMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM,
Ultrasonic Spin-Spray Coater TMAX-KJ12U is an all-in-one film preparation equipment that combines ultrasonic atomization, spin coating, and drying functions for substrates up to 12" (300 mm). The liquid is delivered by a precision syringe pump with an optional heating function. The ultrasonic atomizer can swing over the substrate to ensure coating uniformity (supports up to 4 ultrasonic heads). After coating, the film can be heated and quickly dried. The equipment features a touchscreen control panel for precise parameter adjustment, including ultrasonic power, spray rate, spinning speed, and heating temperature.
Applications: Thin-film preparation for perovskite solar cells, composites, and flexible films.
· Voltage: 208–240 VAC, 50/60 Hz, single-phase
· Total power: 1800 W
· Vacuum chuck for substrates up to 12" diameter or 8" square
· Includes an oil-less vacuum pump (controlled by the spin coater)
· Programmable spin speed: 300–3000 rpm
· 1 ultrasonic generator (up to 50 kHz, 100 W) with 2 spray nozzles
· Nozzles equipped with KF-25 adapters:
o Cylindrical type: Narrower spray (~20 mm diameter)
o Cone type: Wider spray (~40 mm diameter)
· Recommended compressed inert gas/air pressure for aqueous solutions: ~2 psi (not included)
· Fluid viscosity range: 1–50 mPa·s (cP)
· Particle size: 10–20 microns (suspension liquid), ≤10% solid content
· Flow rate: 0.6 pL–4 mL/min
· Swing arm for mounting ultrasonic spray head:
o Swing speed: 1°–20°/s
· Optional: 2–4 additional ultrasonic swing spray heads for layer-by-layer coating (extra cost)
· Includes 1 LCD touchscreen-controlled syringe pump for liquid delivery
· Includes 1 × 50 mL syringe; compatible with syringes of 0.4–30 mm diameter
· Adjustable pumping rate: 0.01–0.99 mm/min (0.08–35 mL/min for the included 50 mL syringe)
· Optional: Heated or multi-channel syringe pump available (extra cost)
· Adjustable parameters:
o Spin speed: 300–3000 RPM
o Nozzle swing speed: 1–20°/s
o Temperature: RT–50°C
o Spraying time: 1–999 seconds
o Syringe pump speed: 0.6 pL–4 mL/min
· Built-in fume hood with 4" venting port
· Integrated IR heater (up to 80°C) for post-coating film drying
· LED light inside the hood
· Gas: ~2 psi compressed air for ultrasonic nozzle (air compressor available for order)
· Note: If using a gas cylinder instead of an air compressor, a two-stage pressure regulator must be installed to limit pressure for safe operation.
· Weight: 250 lbs
· CE Certified
· 1-year limited warranty with lifetime support.
1. Avoid overflushing the water bowl/base with liquid to prevent motor shaft damage. Use a fabric cloth to wipe residues.
2. For optimal coating quality, pre-clean substrates with plasma or UV-Ozone cleaner to reduce surface tension.
3. Reference Articles:
o Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition
o Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells
o Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing
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PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.

ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18559646958
18659217588