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Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM,

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Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12 Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12 Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12

Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM,

  • Product Details

Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM,



Ultrasonic Spin-Spray Coater TMAX-KJ12U is an all-in-one film preparation equipment that combines ultrasonic atomization, spin coating, and drying functions for substrates up to 12" (300 mm). The liquid is delivered by a precision syringe pump with an optional heating function. The ultrasonic atomizer can swing over the substrate to ensure coating uniformity (supports up to 4 ultrasonic heads). After coating, the film can be heated and quickly dried. The equipment features a touchscreen control panel for precise parameter adjustment, including ultrasonic power, spray rate, spinning speed, and heating temperature.

Applications: Thin-film preparation for perovskite solar cells, composites, and flexible films.

Power

· Voltage: 208–240 VAC, 50/60 Hz, single-phase

· Total power: 1800 W

Spin Coater

· Vacuum chuck for substrates up to 12" diameter or 8" square

· Includes an oil-less vacuum pump (controlled by the spin coater)

· Programmable spin speed: 300–3000 rpm

Ultrasonic Spray Nozzle

· 1 ultrasonic generator (up to 50 kHz, 100 W) with 2 spray nozzles

· Nozzles equipped with KF-25 adapters:

Cylindrical type: Narrower spray (~20 mm diameter)

Cone type: Wider spray (~40 mm diameter)

· Recommended compressed inert gas/air pressure for aqueous solutions: ~2 psi (not included)

· Fluid viscosity range: 1–50 mPa·s (cP)

· Particle size: 10–20 microns (suspension liquid), ≤10% solid content

· Flow rate: 0.6 pL–4 mL/min

· Swing arm for mounting ultrasonic spray head:

o Swing speed: 1°–20°/s

· Optional: 2–4 additional ultrasonic swing spray heads for layer-by-layer coating (extra cost)

Syringe Pump

· Includes 1 LCD touchscreen-controlled syringe pump for liquid delivery

· Includes 1 × 50 mL syringe; compatible with syringes of 0.4–30 mm diameter

· Adjustable pumping rate: 0.01–0.99 mm/min (0.08–35 mL/min for the included 50 mL syringe)

· Optional: Heated or multi-channel syringe pump available (extra cost)

Control Panel (Touchscreen)

· Adjustable parameters:

o Spin speed: 300–3000 RPM

o Nozzle swing speed: 1–20°/s

o Temperature: RT–50°C

o Spraying time: 1–999 seconds

o Syringe pump speed: 0.6 pL–4 mL/min

Fume Hood & Heating

· Built-in fume hood with 4" venting port

· Integrated IR heater (up to 80°C) for post-coating film drying

· LED light inside the hood

Utility Requirements

· Gas: ~2 psi compressed air for ultrasonic nozzle (air compressor available for order)

· Note: If using a gas cylinder instead of an air compressor, a two-stage pressure regulator must be installed to limit pressure for safe operation.

Dimensions & Net Weight

· Weight: 250 lbs

Compliance

· CE Certified

Warranty

· 1-year limited warranty with lifetime support.

Application Notes

1. Avoid overflushing the water bowl/base with liquid to prevent motor shaft damage. Use a fabric cloth to wipe residues.

2. For optimal coating quality, pre-clean substrates with plasma or UV-Ozone cleaner to reduce surface tension.

3. Reference Articles:

o Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition

o Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells

o Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing




Spin coater unit






PACKAGE:

  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.

 

DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.