ItemNo :
Lith-KJ6AVMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Precision Atmosphere-Controlled Vacuum 10K RPM Spin Coater For Thin Film
TMAX-KJ6AV is an atmosphere-controllable spin coater with Polypropylene air tightening, which can perform spin coating under either a vacuum or inert gas atmosphere. The sample holder accommodates wafers up to 6". The digital control box is separate from the spin coater, enabling remote operation. The spinning speed is adjustable from 500 to 10,000 rpm with two programmable segments. The package includes a two-stage vacuum pump, digital vacuum gauge, and a 20ml syringe for immediate use.
SPECIFICATIONS
|
Category |
Sub-Item |
Specification |
|
General |
Type |
Atmosphere-controllable (vacuum / inert gas) |
|
|
Material |
Polypropylene (PP) corrosion-resistant casing |
|
|
Control System |
Remote digital control (6-step programmable) |
|
Performance |
Speed Range |
500-10,000 rpm (6 programmable segments) |
|
|
Duration Control |
Up to 999 seconds per step |
|
|
Sample Size |
Up to 6" wafers |
|
Vacuum System |
Chamber Vacuum Pump |
156 L/min two-stage rotary vane pump (max. 110 torr) |
|
|
Chuck Vacuum Pump |
Dry pump (dedicated for vacuum chuck) |
|
|
Filtration |
Standard in-line filter (prevents liquid backflow) |
|
Power Supply |
Standard Input |
220V, 50/60Hz, 1000W max |
|
|
Optional Input |
110V (requires 1500W transformer) |
|
Sample Holding |
Vacuum Mode |
Mechanical fixture (liquid injection under vacuum) |
|
|
Inert Gas Mode |
Vacuum chuck (liquid injection under inert gas) |
|
Dimensions |
Main Unit |
590mm(H) × 250mm(Ø) (chamber: 330mmH x 150mmØ) |
|
|
Controller Box |
330mm × 380mm × 165mm |
|
Shipping |
Package Size |
1016×762×762mm (40×30×30 in) |
|
|
Weight |
46 kg (100 lbs) |
|
Certification |
Compliance |
CE Certified |
|
Warranty |
Coverage |
1-year limited (lifetime support) |
Operational Notes:
✔ Dual Pump System:
· Chamber Pump (156 L/min) for vacuum atmosphere
· Chuck Pump (dry pump) for sample fixation in inert gas mode
✔ Filter Included: Prevents liquid backflow into pumps
Safety Warnings:
1. Avoid liquid overflow in water bowl/base
2. Use fabric cloth for cleaning residues
3. Follow recommended cleaning procedures
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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+86 13174506016
Louis@lithmachine.com
+86 18559646958
18659217588
