ItemNo :
Lith-KJ5PMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
Chemical-Resistant Vacuum Spin Coater Unit With 10K RPM, 5" Chuck , 200°C Heating/UV
Application
Designed for thin-film coating processes in semiconductor, crystal, optical disc, and printing plate industries. Compatible with highly acidic/alkaline coating solutions.
1. Sample Fixation:
Vacuum chuck adsorption (up to -0.08MPa) ensures secure sample placement.
Includes two interchangeable polypropylene chucks (Φ19mm & Φ60mm) for varied sample sizes.
Centering tool minimizes eccentricity-induced vibration or sample slippage.
2. Programmable Control:
Stores 12 programs, each with 6 customizable stages.
Speed gradient control: Ramp rates (100–2000 rpm) prevent material waste and ensure uniform film thickness.
LCD + PCB microcontroller interface for intuitive operation (full English OS).
3. Motor & Performance:
24V DC brushless motor: Low noise, high stability, and rapid acceleration (500–10,000 rpm ±1% accuracy).
Ensures consistent coating uniformity and repeatability.
4. Vacuum System:
Oil-free dual-piston pump: Compact, maintenance-free, and environmentally friendly (exhaust flow ≥70 L/min).
Supports inert gas (Ar/N₂) environment for sensitive materials.
5. Construction:
Chamber: Chemical-resistant polypropylene (excellent stress-cracking resistance).
Body: Lightweight cast aluminum for durability.
6. Safety:
Lid-protection: Auto-deceleration upon opening during operation.
|
Parameter |
Detail |
|
Power Supply |
AC220V 50Hz, 10A (≤150W excluding pump) |
|
Speed Range |
500–10,000 rpm (adjustable in 100 rpm increments) |
|
Program Memory |
12 programs × 6 stages |
|
Stage Duration |
0–60 sec per stage |
|
Vacuum Pressure |
-0.08MPa (max) |
|
Chuck Material |
Polypropylene |
|
Dimensions |
450×340×280 mm (18 kg) |
· Environment: 0–45°C, 10–85% RH (non-condensing).
· Workspace: 800×600×700 mm bench (≥50 kg load capacity; cement recommended).
· Utilities:
o Single-phase grounded outlet (10A).
o Drain port for wastewater.
o No corrosive gases/vibrations nearby.
1. Vacuum chucks (Φ19mm & Φ60mm) with O-rings.
2. Centering tool (4 alignment pins).
3. Dropper +bracket.
4. Oil-free vacuum pump + rubber tube (clamped).
· Imported/domestic pipettes.
· Custom chuck sizes.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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Louis@lithmachine.com
+86 18559646958
18659217588
