ItemNo :
Lith-KJ5UMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
10K RPM Spin Coater Supplier with Ultrasonic Spray - 5" Wafer Capacity & Optional PTFE Heating Cover
Lith-KJ5U is a benchtop spin coater supporting substrates up to 5" diameter with a maximum speed of 10,000 rpm, featuring a heat-resistant PTFE enclosure. The system includes dual ultrasonic spray nozzles and a temperature-controlled glass syringe for multifunctional operation, enabling either liquid atomization or heated solution dispensing. A precision DC servo motor drives the spin head with accurate speed/acceleration control, while vacuum chucking secures thin substrates. The intuitive interface combines a keyboard and LCD display for programming 12 customizable recipes with 6 segments each. All critical parameters (spin duration, speed, acceleration) are adjustable via the front panel. Corrosion-resistant construction ensures cleanroom compatibility.
Note: Compatible with glovebox operation under Ar atmosphere (requires external vacuum pump placement).
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Category |
Specifications |
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Key Features |
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Programmable rotation speed |
500–10,000 RPM |
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PTFE chamber heating |
Up to 200°C |
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Substrate compatibility |
5 mm to 5" diameter |
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Integrated ultrasonic spray nozzles |
Liquid atomization via gravity/low-pressure air |
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Temperature-controlled glass syringe |
Max. 120°C (for heated solution deposition) |
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Gas inlet port |
6 mm diameter (controlled atmosphere processing) |
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Safety interlock |
Integrated into lid mechanism |
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Liquid Injection Methods |
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1. Ultrasonic Spray System |
• Titanium alloy nozzles with adjustable power controller (for spray pyrolysis) • Cylindrical nozzle: ~2 cm spray diameter (concentrated pattern) • Cone nozzle: ~4 cm spray diameter (wide pattern) |
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2. Heated Dispensing |
Glass syringe with digital PID temperature control (max. 120°C) |
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3. Standard Accessory |
20 mL plastic syringe included |
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Coating Chamber |
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Material |
PTFE (chemically resistant) |
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Chamber diameter |
150 mm |
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Maximum temperature |
200°C (≤10 minutes) |
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Vacuum chucks |
PTFE (Ø40 mm and Ø10 mm, for 1"–4" wafers) |
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Vacuum System |
120 L/min oilless pump, includes Ø8 mm plastic tubing |
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Programmable Controls |
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Program storage |
12 programs (6 segments each) • Segment duration: ≤60 sec • Acceleration: 100–2,000 RPM/sec (adjustable) |
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Speed accuracy |
±5% |
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Power Requirements |
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Input voltage |
AC 220V (110V available upon request) |
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Total power |
1,000 W (coater + pump) |
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Motor type |
24V DC high-speed motor |
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Optional Accessories |
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PE heating cover |
PID-controlled (max. 120°C) |
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UV LED curing system |
365 nm wavelength |
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Glovebox feedthrough kit |
For Ar environments |
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Plasma cleaner pre-treatment |
Recommended for optimal coating adhesion |
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18559646958
18659217588
