ItemNo :
Lith-KJ4PMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 days
12,500 RPM High-Speed Spin Coater Device For 4" Wafers—Vacuum Chuck, PP Anti-Corrosion, Ar Compatible
The TMAX-KJ4P is a precision spin coater capable of reaching 12,500 rpm (13,000 rpm max for <60 sec) for substrates up to 5" diameter. It features a DC servo motor-driven spin head with programmable speed/acceleration control and vacuum chuck compatibility for thin substrates. The corrosion-resistant design is cleanroom- and glovebox-compatible (Ar gas environment supported).
|
Section |
Parameter |
Specification |
|
Main Features |
Spinning Speed |
Programmable 500-12,500 RPM (13,000 RPM max for <60 sec) |
|
|
Substrate Compatibility |
10 mm to 5" (127 mm) diameter |
|
|
Chamber Material |
Anti-corrosive PP construction |
|
|
Gas Inlet |
6 mm port for inert gas purging |
|
|
Safety |
Integrated lid interlock |
|
|
Glovebox Compatibility |
Ar environment compatible (requires external vacuum pump) |
|
Vacuum Chuck |
Chamber Diameter |
150 mm |
|
|
Included Chucks |
2 aluminum vacuum chucks (20-100 mm substrates) |
|
Vacuum Pump (Optional) |
Type |
Compact oil-free pump |
|
|
Glovebox Requirement |
Must be placed outside glovebox |
|
|
Feedthrough |
Required for integration (sold separately) |
|
Control Panel |
Program Capacity |
12 programs (6 segments each) |
|
|
Speed Range |
500-12,500 RPM programmable |
|
|
Duration |
0-999 sec per segment |
|
|
Acceleration |
100-2,000 RPM/sec adjustable |
|
|
Speed Accuracy |
<5% deviation |
|
Input Power |
Voltage |
Selectable AC 110V/220V |
|
|
Power Consumption |
1,000 W total (coater + pump) |
|
|
Motor |
24V DC high-speed servo |
|
Liquid Injection |
Standard Package |
20 mL plastic syringe with needle |
|
|
Optional Accessories |
1. Electronic pipette (20-200 µL) 2. Heatable glass syringe (to 200°C) 3. Heating cover (to 120°C) |
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Compliance |
Certifications |
CE, NRTL, CSA (electrical components) |
|
|
Warranty Exclusions |
Rust/damage from improper storage |
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
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ONLINE
+86 13174506016
Louis@lithmachine.com
+86 18559646958
18659217588
