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Three-channel Air Supply Gas Flow System

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Three-channel Air Supply Gas Flow System

Three-channel Air Supply Gas Flow System

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  • Warranty:

    2 years
  • Delivery Time:

    5 days
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  • Product Details

Three-channel Air Supply Gas Flow System

1.  Overview

 1.1. The gas exits the cylinder, is depressurized through a pressure reducing valve, passes through the PTFE tube to the inlet of the gas supply system, and then passes through the mass flow meter to control the gas flow, and then passes through the gas mixing tank and then enters the furnace inlet.

1.2. A pressure gauge is attached to the gas mixing tank, and the pressure gauge display disk and the proton flowmeter controller are installed on the same panel.

1.3. Each gas line has a high pressure shut-off valve for safety.

1.4. The gas path adopts a high-precision gas mass flow meter, and the inside of the gas path is entirely made of stainless steel pipe, which has good corrosion resistance.

1.5. All the joints in the box are connected by stainless steel ferrules, which have good air tightness and high pressure resistance.


2. Technical parameters:

Pneumatic channel: 3

Gas flow control: mass flow meter.

Cabinet dimensions: 600X600X600mm

Mass flowmeter technical parameters:

     Interface: Φ6

     Display: LED

     Working environment temperature: 5~45°C

Flow controller: Proton flow controller parameters Please check back

Stainless steel tube: Φ6 outside X Φ4

Pressure vacuum table: -0.1~0.15 MPa, 0.01 MPa/division

Stop valve: Φ6

Flow control: PLC intelligent control  


Mass flowmeter technical parameters:

Product Name: Mass Flow Controller

Product Description : Normal type, analog circuit

Product details: Ordinary, analog circuit, rubber seal, tubular shunt, not easy to block.

Main indicators: Range: 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range arbitrarily)

• Accuracy: ±1% F.S

• Linear: 0.5% F.S

• Repeatability: ±0.2% F.S

• Response time: 1S

• Air pressure drop: <0.01MPa

• Maximum pressure: 3MP

• Working environment temperature: 5~45°C

• Input and output signals: 0~+5.00V

• Power: +15V 50mA -15V 50mA

• Dimensions: 158*30*110

• Weight: 0.9 Kgg


3. Configuration of the gas supply system:

    3.1. Proton flowmeter: 3

    3.2. Mechanical pressure gauge (range -0.1~0.15MPa): 1

    3.3. Stainless steel cut-off valve: 4

    3.4. Stainless steel plate joints: 4

    3.5. Stainless steel valve connector: 2

    3.6. Stainless steel cylinder connector: 3

    3.7. PTFE tube: 15M

    3.8. Mixing tank Dia80X140MM: 1

    3.9. Furnace rack: 1 set

Air Supply System


  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.


DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.