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Small 4" RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

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Small 4" RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

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  • Warranty:

    2 years
  • Delivery Time:

    5 days
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  • Product Details

Small 4" RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

LITH-1200X-RTP-HV-LD is a UL certifiable compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 50 segments precision temperature controller is built in with accuracy +/-1° C. 



Compact 4“ RTP Tube FurnaceDouble layer steel case mullite liner)

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Working Temp.

1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )

Max heating rate

50°  C/sec

Max cooling rate

64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)  

Heating zone

12" length with 4" constant temperature zone within +/-1°C uniformity

Program Temp. Controller

  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • PC Control:  
    • MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping


Quartz Tube & Sample Holder

  • Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
  • 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
  • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
  • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
  • The sample holder is removable from flange

Vacuum flange

KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement. 

Water Cooling Jacket

  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min 

Power input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

HV Station
High Vacuum Station


  • Mobile cart size:  600 (L) x 600 (W) x 700(W), mm
  • Max. Loading:       600 Lbs on top
  • Molecular pump control Panel :   LCD digital
  • Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel case. 

Vacuum Degree

6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)

Control panel

  • One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
  • System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
  • Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 
  • LCD screen - double lines parameters checking interface make the working easier to be handled.
            Self testing                                                   Spinning up

Start-up time

2 minutes

Backing Pump Volume Flow Rate at 10 mbar

3.8 L/min for 50Hz and 4.4 L/min for 60Hz 

Power input

110V AC or 220V AC switchable, 50/60Hz

Power consumption

Duration/Max power: 100/110Watt

Shipping Info

Weight and Dimension

RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H


Two years limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.


  • CE Certified
  • The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 
  • Temperature controller is MET and CE Certified
  • High Vacuum Station is TUV Certified    

Tube Furnace


  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.


DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.