Products
Home Products Lab Coater Sputtering Coater

Vacuum Thermal Evaporating Coating Coater Machine With Temperature Control

Product Categories

Contact Us

  • Contact Person : Louis Yang
  • Email : [email protected]
  • Address : No. 5 Nanshan Road, Huli District, Xiamen City, Fujian Province, China
Vacuum Thermal Evaporating Coating Coater Machine With Temperature Control

Vacuum Thermal Evaporating Coating Coater Machine With Temperature Control

  • ItemNo :

    GSL-1700X-SPC-2
  • MOQ :

    1
  • Lead Date :

    20 days
  • Compliance:

    CE Certified
  • Warranty:

    1 year
  • Email :

    [email protected]
  • Product Details

Vacuum Thermal Evaporating Coating Coater Machine With Temperature Control



GSL-1700X-SPC-2 is a compact thermal evaporating coater with precision and programmable temperature control, which is suitable for coating most of metallic and organic materials film up to 2" size from 200 ºC to 1500 ºC (or 200 ºC - 1700 ºC with an optional B-type thermocouple). A rotatable sample holder is built in to allow uniform film coating.

 

SPECIFICATIONS:    

Structure & Features
Hi-Vacuum Thermal Evaporating Coater

  • 6" OD x 10”H quartz chamber for easy cleaning and sample loading
  • 2" Dia rotatable sample holder for uniform film coating
  • Tungsten coil heater and alumina crucible for high-temperature coating up to 1700 ºC
  • Precision temperature control with 30 programmable segments and +/- 1 ºC accuracy
  • High vacuum can be achieved up to 1.0E-5 Torr via optional turbopump
  • Gas flow port and valve are built in for chamber purge and CVD possibility

Input Power

  • Input voltage:  208 - 240 VAC 50/60 Hz, single phase
  • Input Power: 500 W
  • Output Power: 40 A max current. Recommended working current <20 A
  • Power cable included without the plug

Temperature Control & Heaters
Hi-Vacuum Thermal Evaporating Coater

Tungsten coil heater with a thermocouple is built in at the bottom of alumina crucible (for temperature control (PIC. 1). Please refer to the left picture for dimensions
  • Standard S type thermocouple (included and installed) - heating from 200 ºC - 1500 ºC (PIC. 2)
  • Optional B-type thermocouple (at extra cost) - heating from 1200 ºC - 1700 ºC
  • One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy (PIC. 3)
  • The time settings of temperature controller are in seconds. Recommend to limit the temperature heating / cooling rate to 0.3 ºC/s (or 20 ºC/min) below 1200 ºC, and limit to 0.15 ºC/s (or 10 ºC/min) from 1200 - 1700 ºC
  • For continuous heating above 1300 ºC, please limit the operation time to less than 1 hour to preserve the service life of bottom flange O-ring
  • For fast coating up to 2000 °C, such as needed in Carbon coating, the user can remove thermocouple, alumina thermal block, and alumina crucible, load evaporation material directly into the tungsten coil heater, and use current manual control mode (PIC. 4)
  • Four alumina crucibles (up to 1700 ºC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts

 Hi-Vacuum Thermal Evaporating Coater

Sample Holder
Hi-Vacuum Thermal Evaporating Coater

  • One 50 mm Dia. rotatable sample stage and its shutter are installed on top flange.
  • Rotating speed: 5 rpm
  • The distance from the sample holder to evaporation source is adjustable from 40 mm to 85 mm

Film Thickness Monitor (optional)

Precision quartz thickness sensor is optional. It can be built into the chamber to provide instant film thickness monitoring with accuracy of 0.10 Å. LED Display Unit outside the chamber can:

·      

    • Input coating material info based on the included database
    • Display total coating thickness and coating speed
  • Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is available at extra cost

                Hi-Vacuum Thermal Evaporating Coater

Vacuum
Hi-Vacuum Thermal Evaporating Coater

  • KF25 vacuum port is installed to connect to a vacuum pump
  • The highest vacuum may reach <4.0E-6 Torr by pumping overnight with optional Turbomolecular pump
  • A vacuum pump is required for coating. Please choose from the following Product Options
    • No vacuum pump. Anti-Corrosive Capacitance Diaphragm Gauge is included for vacuum up to 1.0E-6 Torr
    • Double Stage Rotary Vane Vacuum Pump with vapor trap to eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials, such as gold, silver, and organic materials. 
    • Hi-Vacuum Thermal Evaporating Coater

Gas Inlet

  • 1/4 tube fitting is built in for chamber purge or forming gas processing
  • One needle valve is built-in to control gas flowing rate

Optional

  • Extra alumina crucible and tungsten coil heater can be ordered at TMAX at extra cost
  • Total 4 evaporating sources crucibles could be used to deposit multiple different materials to grow multilayers one by one in the same chamber atmosphere.

Overall dimension


 

       Hi-Vacuum Thermal Evaporating Coater      

Quartz Chamber Dimension


 

O.D.:165mm
I.D.: 150mm
Length: 250mm

Compliance

  • CE Certificate           

Warranty

 

  • One year limited warranty with lifetime support

Net Weight

  • 50 kg 

Shipping Weight & Dimensions

  • 130 lbs, 40" x 30" x 32"

Application Notes


  • To achieve the high vacuum required for the evaporation of some materials, user can
    • Check the chamber, O-ring, and flange for any particle, fiber, or scratch. Use lint free tissue wetted with isopropyl alcohol (IPA) to wipe clean the surface
    • Use heater tape to bake the chamber at 150 ºC and pre-heat the coil heater and crucible at 500 ºC while pumping with the optional turbo pump for at least 2 hours
    • Pump the chamber overnight without heating if a vacuum higher than 1.0E-5 Torr is needed
  • The coater can be placed into an Ar or N2 gas glove box for thermal evaporation of humility & oxygen sensitive materials, such as Li metal.
  • DO NOT start the heating program or manually ramp up the current without an enclosed chamber and a vacuum!
  • DO NOT release the vacuum or stop pumping when the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 ºC!






DC Magnetron Sputtering









PACKAGE:

  1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

  2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

  3 Responsible for the damage during the shipping process, will change the damaged part for you for free.

 

DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to 

production season and order quantity.