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Contact Us

Contact Person : Louis Yang
Tel : +86 13174506016
Email : Louis@lithmachine.com
Whatsapp : +86 18559646958
Wechat : 18659217588
Address : No. 5 Nanshan Road, Huli District, Xiamen City, Fujian Province, China

6-inch 6000 RPM Desktop Wafer Spin Coater With Inert Gas Ar Compatible

ItemNo :
Lith-KJ6A
MOQ :
1
Compliance:
CE Certified
Warranty:
1 year
Delivery Time:
5 days

Email :

Louis@lithmachine.com

Whatsapp :

+86 18559646958

Wechat :

18659217588

Contact Now

Product Details

6-inch 6000 RPM Desktop Wafer Spin Coater With Inert Gas Ar Compatible

Applicable for surface coating processes in semiconductors, crystals, optical discs, plate-making, etc. This machine can prepare coatings using strongly acidic or alkaline solutions. The KJ6A chamber does not support vacuum extraction; instead, it uses vacuum chuck adsorption to secure samples on the loading tray. The device can store 12 programs, each containing 6 operation stages. Different rotation speeds at each stage allow gradual acceleration to maximum speed, ensuring uniform thin-film deposition while minimizing material waste. The chamber lid provides optional heating functionality to facilitate coating with high-viscosity materials.

Key Features

Feature	Specification
Program Storage	12 groups, 6 stages each
Speed Adjustment Range	100-2000 rpm/s per stage
Time Range	0-60s per stage
Vacuum Adsorption	Up to -0.08MPa
Centering Tool	Included, Reduces vibration and fly-off
Chuck Options	changeable
Motor	24V DC brushless Stepless speed control
Glove Box Compatibility	Vacuum Chamber only
Inert Gas Support	Ar/N₂ compatible
Vacuum Pump	Oil-free twin-piston: No oil contamination
Chamber Material	Polypropylene: Chemical resistant
Safety Feature	Auto-deceleration when opened
Control System	PCB MCU + LCD display

Installation Requirements

Parameter	Requirement
Temperature	0-45°C
Humidity	10-85% RH (at 25°C, no condensation)
Environment	No strong vibrations/corrosive gases
Water Drainage	Equipped with outlet
Power Supply	AC220V 50Hz, 10A (grounded)
Vacuum Flow	≥70L/min
Workbench	800×600×700mm (≥100kg load)

Technical Parameters

Parameter	Specification
Power Input	AC220V 50Hz (10A fuse, φ5×20mm)
Power Consumption	≤150W (without pump)
Chamber Material	Polypropylene
Chuck Size	Φ100mm
Speed Range	500-6000 rpm
Speed Stability	±1%
Control Method	PCB MCU + LCD
Heating (Optional)	RT-100°C (±2°C)
Heating Power	AC220V 1000W

Dimensions & Weight

Component	Size	Weight
Main Unit	Φ250×360mm	15kg
Control Box	330×380×150mm

Standard Accessories:

1. Φ100mm vacuum chuck ×1

2. O-ring ×1

3. Liquid dropper ×1

4. Dropper stand ×1

5. Centering tool ×1

6. Oil-free vacuum pump ×1

Optional Accessories:

1. Imported pipette

2. Domestic pipette gun

spin coater device

PACKAGE:

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damaged part for you for free.

DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to

production season and order quantity.

HotTags : Desktop Spin Coater Wafer Spin Coater Inert Gas Spin Coater